Industrial Utility Efficiency    

Busch COBRA BC 0100 Achieves Milestone at Global Foundries

For twelve years of continuous operation, amounting to over 18.9 billion rotations, a Busch COBRA BC 0100 dry screw vacuum pump passed this remarkable milestone in a semiconductor foundry in Germany. Thus, living up to its reputation for robustness, reliability and low maintenance.

The COBRA BC 0100 in question has been in continuous operation at the Global Foundries production site in Dresden, Germany, since 2005 and is the longest-operating COBRA BC 0100 at the site, known as Fab 1. Fab 1 in Dresden was the world's first fab to manufacture microchips with copper wiring in industrial quantities – a technology now the basis for semiconductor production throughout the world. 


Busch COBRA BC 0100 vacuum pumps are predominantly used in the load-lock applications of epitaxy and physical vapor deposition (PVD) processes.


A total of two-hundred and three (203) COBRA BC 0100 dry screw vacuum pumps are installed at the Dresden site, producing 300 mm wafers for the semiconductor industry. Thirty-one (31) of these COBRA BC 0100s have been in continuous operation for over 10 years, and fifteen (15) of the COBRA BC 0100s have passed the milestone of 100,000 operating hours (over 11 years of operation). Generally, continuous operation over five or six years is the industry expectation in load-lock applications.

COBRA BC 0100 vacuum pumps are predominantly used in the load-lock applications of epitaxy and physical vapor deposition (PVD) processes. They are also used in other contamination-free processes for wafer handling and metrics to assure the quality of the lithography process.

The COBRA BC 0100 is a dry screw vacuum pump within the proven COBRA BC 0100 series portfolio that is a compact state-of-the-art load-lock solution with additional process capabilities for the most demanding solar, flat panel and semiconductor applications. It has excellent powder handling capabilities as a result of its unique screw pump design.

The COBRA BC 0100 series is also available in a COBRA BC 0100 Premium Efficiency class with a reduced energy footprint resulting in lower electrical energy use of up to 40%. The Premium Efficiency class is based on the proven technology platform of the COBRA BC 0100.

Busch Vacuum Pumps and Systems maintains a service team in Dresden, consisting of nine service technicians and one team leader in a 24/7 shift system, ensuring very high system availability of the nearly nine-hundred (900) installed Busch vacuum pumps. Furthermore, the service team maintains the waste gas abatement systems.

Global Foundries is among the top semiconductor companies in the world and manufactures at its Dresden fab 40 nm to 22 nm nodes. The Dresden fab is Europe's largest fab for the production of microchips.


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