Considerations for Sizing Vacuum Pumps in High Humidity Applications
Many of us are familiar with sizing vacuum pumps based on throughput, process pressure requirements, chamber size, pump down times, conductance and leakage. In a lot of cases, humidity becomes an afterthought and unexpected things happen. Some of these unexpected things we learn to live with, like emulsified oil. In other cases, the unexpected things prevent the pump from performing the job it was intended for.